Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |