Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Young-Hoo Kim, Hyo-San Lee, Tae-Keun Kim, Ye Rim Yeon +3 more | 2021-10-19 |
| 11091696 | Etching composition and method for manufacturing semiconductor device using the same | Yongtae Kim, Junghun Lim, Soojin Kim, Seungmin Jeon, Hayoung JEON | 2021-08-17 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Kuntack Lee +1 more | 2021-04-27 |
| 10983088 | Coulometric microfluidic sensors using a silver band electrode, and methods thereof | Kwok-Fan Chow, Mahadurage Sachintha Wijesinghe | 2021-04-20 |