Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao | 2021-10-12 |
| 11104990 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Xinjian Lei, Moo-Sung Kim | 2021-08-31 |
| 11017998 | Precursors and flowable CVD methods for making low-K films to fill surface features | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2021-05-25 |
| 10985013 | Method and precursors for manufacturing 3D devices | Robert Gordon Ridgeway, Xinjian Lei, Raymond Nicholas Vrtis, Bing Han, Madhukar Bhaskara Rao | 2021-04-20 |
| 10923327 | Chamber liner | Lai ZHAO, Robin L. Tiner, Allen Lau, Gaku Furuta, Soo Young Choi | 2021-02-16 |