Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164739 | Use of silicon structure former with organic substituted hardening additive compounds for dense OSG films | Robert Gordon Ridgeway, Jennifer Lynn Anne Achtyl, William Robert Entley, Dino Sinatore, Kathleen Esther Theodorou | 2021-11-02 |
| 11158498 | Silicon compounds and methods for depositing films using same | Robert Gordon Ridgeway, Jennifer Lynn Anne Achtyl, Xinjian Lei, William Robert Entley | 2021-10-26 |
| 11043374 | Silacycloalkane compounds and methods for depositing silicon containing films using same | Manchao Xiao, Robert Gordon Ridgeway, Daniel P. Spence, Xinjian Lei | 2021-06-22 |
| 11017998 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2021-05-25 |
| 10985013 | Method and precursors for manufacturing 3D devices | Jianheng Li, Robert Gordon Ridgeway, Xinjian Lei, Bing Han, Madhukar Bhaskara Rao | 2021-04-20 |