Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Jianheng Li | 2021-10-12 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill | 2021-04-27 |
| 10899500 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Richard Ho, Daniel P. Spence, Xinjian Lei | 2021-01-26 |