Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2021-10-05 |
| 11098069 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Manchao Xiao | 2021-08-24 |
| 11078569 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Xinjian Lei, Matthew R. MacDonald | 2021-08-03 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |