Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180678 | Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2021-11-23 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2021-10-05 |
| 11078417 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2021-08-03 |
| 11072726 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou | 2021-07-27 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein | 2021-04-27 |
| 10920106 | Metal chemical mechanical planarization (CMP) composition and methods therefore | Xiaobo Shi | 2021-02-16 |
| 10894906 | Composite particles, method of refining and use thereof | Hongjun Zhou, John Edward Quincy Hughes, Krishna P. Murella, Reinaldo Mario Machado, Dnyanesh Chandrakant Tamboli | 2021-01-19 |