Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180678 | Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Mark Leonard O'Neill | 2021-11-23 |
| 11111415 | Chemical mechanical planarization of films comprising elemental silicon | James M. Henry, Krishna P. Murella, Dnyanesh Chandrakant Tamboli, Joseph D. Rose | 2021-09-07 |
| 11104825 | Metal compound chemically anchored colloidal particles and methods of production and use thereof | Xiaobo Shi, Jo-Ann Theresa Schwartz | 2021-08-31 |
| 11078417 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Mark Leonard O'Neill | 2021-08-03 |
| 11072726 | Low oxide trench dishing chemical mechanical polishing | Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Mark Leonard O'Neill | 2021-07-27 |
| 11066575 | Chemical mechanical planarization for tungsten-containing substrates | Xiaobo Shi, James Allen Schlueter, Jo-Ann Theresa Schwartz | 2021-07-20 |
| 10894906 | Composite particles, method of refining and use thereof | John Edward Quincy Hughes, Krishna P. Murella, Reinaldo Mario Machado, Mark Leonard O'Neill, Dnyanesh Chandrakant Tamboli | 2021-01-19 |