Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2021-08-17 |
| 10964533 | ALD process and hardware with improved purge efficiency | Xiangxin Rui | 2021-03-30 |