Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2021-08-17 |
| 10903048 | Substrate processing method and apparatus for controlling phase angles of harmonic signals | Yui Lun WU, Jozef Kudela, Suhail Anwar | 2021-01-26 |
| 10886053 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, John M. White | 2021-01-05 |