Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024529 | System and method for residual voltage control of electrostatic chucking assemblies | Shreesha Yogish Rao | 2021-06-01 |
| 10886053 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2021-01-05 |