Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Shinichi Kurita +1 more | 2021-08-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Shinichi Kurita +1 more | 2021-08-17 |