Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more | 2021-08-17 |
| 11053592 | Substrate temperature monitoring | — | 2021-07-06 |
| 10991916 | Thin-film encapsulation | Tae Kyung Won, Soo Young Choi | 2021-04-27 |