Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903048 | Substrate processing method and apparatus for controlling phase angles of harmonic signals | Yui Lun WU, Jozef Kudela, Carl A. Sorensen | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903048 | Substrate processing method and apparatus for controlling phase angles of harmonic signals | Yui Lun WU, Jozef Kudela, Carl A. Sorensen | 2021-01-26 |