Issued Patents 2021
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189729 | Forming a sacrificial liner for dual channel devices | Huiming Bu, Kangguo Cheng, Dechao Guo, Peng Xu | 2021-11-30 |
| 11152489 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, David L. Rath, Indira Seshadri +1 more | 2021-10-19 |
| 11145658 | Semiconductor structures with deep trench capacitor and methods of manufacture | Kevin K. Chan, Babar A. Khan, Masaharu Kobayashi, Effendi Leobandung, Theodorus E. Standaert +1 more | 2021-10-12 |
| 11107821 | Semiconductor structures with deep trench capacitor and methods of manufacture | Kevin K. Chan, Babar A. Khan, Masaharu Kobayashi, Effendi Leobandung, Theodoras E. Standaert +1 more | 2021-08-31 |
| 11094824 | Forming a sacrificial liner for dual channel devices | Huiming Bu, Kangguo Cheng, Dechao Guo, Peng Xu | 2021-08-17 |
| 11081566 | Self-aligned contacts for vertical field effect transistors | Su Chen Fan, Ekmini Anuja De Silva | 2021-08-03 |
| 11075281 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, David L. Rath, Indira Seshadri +1 more | 2021-07-27 |
| 11056493 | Semiconductor structures with deep trench capacitor and methods of manufacture | Kevin K. Chan, Babar A. Khan, Masaharu Kobayashi, Effendi Leobandung, Theodorus E. Standaert +1 more | 2021-07-06 |
| 11018007 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Christopher J. Penny +2 more | 2021-05-25 |
| 10957694 | Epitaxial oxide fin segments to prevent strained semiconductor fin end relaxation | Karthik Balakrishnan, Keith E. Fogel, Alexander Reznicek | 2021-03-23 |
| 10957583 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Sean D. Burns, Lawrence A. Clevenger, Matthew E. Colburn, Yann Mignot, Christopher J. Penny +2 more | 2021-03-23 |
| 10937867 | Conformal doping for punch through stopper in fin field effect transistor devices | Huiming Bu, Fee Li Lie, Tenko Yamashita | 2021-03-02 |