Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152489 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, Sivananda K. Kanakasabapathy, Indira Seshadri +1 more | 2021-10-19 |
| 11094873 | Transmon qubits with self defined junctions | Vivekananda P. Adiga, Martin O. Sandberg | 2021-08-17 |
| 11075281 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Kisup Chung, Andrew M. Greene, Sivananda K. Kanakasabapathy, Indira Seshadri +1 more | 2021-07-27 |
| 11024512 | Selective etch formulation for silicon oxide | Ali Afzali-Ardakani, Benjamin Wymore, George G. Totir | 2021-06-01 |