Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152489 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Andrew M. Greene, Sivananda K. Kanakasabapathy, David L. Rath, Indira Seshadri +1 more | 2021-10-19 |
| 11133189 | Metal cut patterning and etching to minimize interlayer dielectric layer loss | Ekmini Anuja De Silva, Andrew M. Greene, Siva Kanakasabapathy, Indira Seshadri | 2021-09-28 |
| 11075281 | Additive core subtractive liner for metal cut etch processes | Ruqiang Bao, Andrew M. Greene, Sivananda K. Kanakasabapathy, David L. Rath, Indira Seshadri +1 more | 2021-07-27 |
| 10978550 | Efficient metal-insulator-metal capacitor | Isabel C. Estrada-Raygoza, Hemanth Jagannathan, Chi-Chun Liu, Yann Mignot, Hao Tang | 2021-04-13 |