Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189566 | Tight pitch via structures enabled by orthogonal and non-orthogonal merged vias | Dongbing Shao, Lawrence A. Clevenger, Shyng-Tsong Chen, Jing Sha | 2021-11-30 |
| 11177437 | Alignment through topography on intermediate component for memory device patterning | Michael Rizzolo, Injo Ok, Theodorus E. Standaert | 2021-11-16 |
| 11022890 | Photoresist bridging defect removal by reverse tone weak developer | Zhenxing Bi, Karen E. Petrillo, Nicole Saulnier | 2021-06-01 |
| 11022891 | Photoresist bridging defect removal by reverse tone weak developer | Zhenxing Bi, Karen E. Petrillo, Nicole Saulnier | 2021-06-01 |
| 10978550 | Efficient metal-insulator-metal capacitor | Kisup Chung, Isabel C. Estrada-Raygoza, Hemanth Jagannathan, Chi-Chun Liu, Yann Mignot | 2021-04-13 |
| 10915085 | Developer critical dimension control with pulse development | Richard C. Johnson, Yongan Xu | 2021-02-09 |