Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031248 | Alternating hardmasks for tight-pitch line formation | Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2021-06-08 |
| 11018007 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny +2 more | 2021-05-25 |
| 10957583 | Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs | Lawrence A. Clevenger, Matthew E. Colburn, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more | 2021-03-23 |
| 10930504 | Selective gas etching for self-aligned pattern transfer | John C. Arnold, Yann Mignot, Yongan Xu | 2021-02-23 |