| 11205723 |
Selective source/drain recess for improved performance, isolation, and scaling |
Ardasheir Rahman, Brent A. Anderson, Junli Wang, Christopher J. Waskiewicz |
2021-12-21 |
| 11183389 |
Fin field effect transistor devices with self-aligned gates |
Wenyu Xu, Ruilong Xie, John R. Sporre |
2021-11-23 |
| 11171002 |
Alternating hardmasks for tight-pitch line formation |
John C. Arnold, Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Yann Mignot |
2021-11-09 |
| 11121024 |
Tunable hardmask for overlayer metrology contrast |
Ekmini Anuja De Silva, Nelson Felix, Indira Seshadri |
2021-09-14 |
| 11031248 |
Alternating hardmasks for tight-pitch line formation |
Sean D. Burns, Nelson Felix, Chi-Chun Liu, Yann Mignot |
2021-06-08 |
| 10985025 |
Fin cut profile using fin base liner |
Eric R. Miller, Yann Mignot, Indira Seshadri, Christopher J. Waskiewicz |
2021-04-20 |
| 10943911 |
Vertical transport devices with greater density through modified well shapes |
Brent A. Anderson, Junli Wang |
2021-03-09 |
