Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205723 | Selective source/drain recess for improved performance, isolation, and scaling | Ardasheir Rahman, Brent A. Anderson, Junli Wang, Christopher J. Waskiewicz | 2021-12-21 |
| 11183389 | Fin field effect transistor devices with self-aligned gates | Wenyu Xu, Ruilong Xie, John R. Sporre | 2021-11-23 |
| 11171002 | Alternating hardmasks for tight-pitch line formation | John C. Arnold, Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Yann Mignot | 2021-11-09 |
| 11121024 | Tunable hardmask for overlayer metrology contrast | Ekmini Anuja De Silva, Nelson Felix, Indira Seshadri | 2021-09-14 |
| 11031248 | Alternating hardmasks for tight-pitch line formation | Sean D. Burns, Nelson Felix, Chi-Chun Liu, Yann Mignot | 2021-06-08 |
| 10985025 | Fin cut profile using fin base liner | Eric R. Miller, Yann Mignot, Indira Seshadri, Christopher J. Waskiewicz | 2021-04-20 |
| 10943911 | Vertical transport devices with greater density through modified well shapes | Brent A. Anderson, Junli Wang | 2021-03-09 |