Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171002 | Alternating hardmasks for tight-pitch line formation | John C. Arnold, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171002 | Alternating hardmasks for tight-pitch line formation | John C. Arnold, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2021-11-09 |