Issued Patents 2021
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195995 | Back-end-of-line compatible processing for forming an array of pillars | Chi-Chun Liu, Yann Mignot, Ekmini Anuja De Silva, Nelson Felix | 2021-12-07 |
| 11189527 | Self-aligned top vias over metal lines formed by a damascene process | Timothy Mathew Philip, Sagarika Mukesh, Dominik Metzler, Ashim Dutta | 2021-11-30 |
| 11189783 | Embedded MRAM device formation with self-aligned dielectric cap | Dominik Metzler, Ashim Dutta, Donald F. Canaperi | 2021-11-30 |
| 11189561 | Placing top vias at line ends by selective growth of via mask from line cut dielectric | Ashim Dutta, Ekmini Anuja De Silva, Dominik Metzler | 2021-11-30 |
| 11189528 | Subtractive RIE interconnect | Balasubramanian S. Pranatharthi Haran, Takeshi Nogami | 2021-11-30 |
| 11171002 | Alternating hardmasks for tight-pitch line formation | Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2021-11-09 |
| 11158786 | MRAM device formation with controlled ion beam etch of MTJ | Ashim Dutta, Chih-Chao Yang, Lijuan Zou | 2021-10-26 |
| 11152261 | Self-aligned top via formation at line ends | Ashim Dutta, Dominik Metzler | 2021-10-19 |
| 11133260 | Self-aligned top via | Chi-Chun Liu, Dominik Metzler, Nelson Felix, Ashim Dutta | 2021-09-28 |
| 10957850 | Multi-layer encapsulation to enable endpoint-based process control for embedded memory fabrication | Ashim Dutta, Isabel Cristina Chu, Son V. Nguyen, Michael Rizzolo | 2021-03-23 |
| 10930504 | Selective gas etching for self-aligned pattern transfer | Sean D. Burns, Yann Mignot, Yongan Xu | 2021-02-23 |