Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183389 | Fin field effect transistor devices with self-aligned gates | Wenyu Xu, Stuart A. Sieg, Ruilong Xie | 2021-11-23 |
| 11152266 | Vertical tunneling field effect transistor with dual liner bottom spacer | Eric R. Miller, Marc A. Bergendahl, Kangguo Cheng, Sean Teehan | 2021-10-19 |
| 11127815 | Semiconductor device and method of forming the semiconductor device | Marc A. Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert R. Robison +1 more | 2021-09-21 |
| 11043581 | Nanosheet channel-to-source and drain isolation | Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Eric R. Miller, Sean Teehan | 2021-06-22 |
| 11024715 | FinFET gate cut after dummy gate removal | Siva Kanakasabapathy, Andrew M. Greene, Jeffrey C. Shearer, Nicole Saulnier | 2021-06-01 |
| 11004944 | Gate cut device fabrication with extended height gates | Kangguo Cheng, Andrew M. Greene, Peng Xu | 2021-05-11 |
| 10985250 | Gate cut device fabrication with extended height gates | Kangguo Cheng, Andrew M. Greene, Peng Xu | 2021-04-20 |
| 10957536 | Removal of trilayer resist without damage to underlying structure | Muthumanickam Sankarapandian, Soon-Cheon Seo, Indira Seshadri | 2021-03-23 |
| 10937810 | Sub-fin removal for SOI like isolation with uniform active fin height | Marc A. Bergendahl, Kangguo Cheng, Gauri Karve, Fee Li Lie, Eric R. Miller +1 more | 2021-03-02 |