Issued Patents 2021
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171051 | Contacts and liners having multi-segmented protective caps | Jennifer Fullam, Su Chen Fan, Christopher J. Waskiewicz | 2021-11-09 |
| 11152298 | Metal via structure | Yann Mignot, James J. Kelly, Yongan Xu, Hsueh-Chung Chen, Daniel J. Vincent | 2021-10-19 |
| 11133308 | Uniform work function metal recess for vertical transistor complementary metal oxide semiconductor technology | Ruilong Xie, Chanro Park, Kangguo Cheng | 2021-09-28 |
| 11075280 | Self-aligned gate and junction for VTFET | Zuoguang Liu, Kangguo Cheng, Oleg Gluschenkov | 2021-07-27 |
| 11037822 | Svia using a single damascene interconnect | Yann Mignot, Yongan Xu, Joe Lee | 2021-06-15 |
| 10957536 | Removal of trilayer resist without damage to underlying structure | Soon-Cheon Seo, Indira Seshadri, John R. Sporre | 2021-03-23 |
| 10943992 | Transistor having straight bottom spacers | Kangguo Cheng, Christopher J. Waskiewicz, Michael P. Belyansky, Brent A. Anderson, Puneet Harischandra Suvarna +1 more | 2021-03-09 |
| 10937789 | Nanosheet eDRAM | Alexander Reznicek, Donald F. Canaperi, Keith E. Fogel | 2021-03-02 |
| 10896816 | Silicon residue removal in nanosheet transistors | Zhenxing Bi, Thamarai S. Devarajan, Nicolas Loubet, Binglin Miao, Charan V. Surisetty +2 more | 2021-01-19 |
| 10886197 | Controlling via critical dimension with a titanium nitride hard mask | Yann Mignot, Yongan Xu | 2021-01-05 |