Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2021-06-08 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min | 2021-03-16 |