Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171030 | Methods and apparatus for dechucking wafers | Anwar Husain, Haitao Wang, Sergio Fukuda Shoji | 2021-11-09 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2021-09-28 |
| 10954595 | High power showerhead with recursive gas flow distribution | Xiaoping Zhou | 2021-03-23 |
| 10943808 | Ceramic electrostatic chuck having a V-shape seal band | Ippei Nakagawa, Nobuhiro Yoshida | 2021-03-09 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2021-02-23 |
| 10886107 | Extended detachable gas distribution plate and showerhead incorporating same | Xiaoping Zhou | 2021-01-05 |