Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Jaeyong Cho, Hamid Noorbakhsh +3 more | 2021-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Jaeyong Cho, Hamid Noorbakhsh +3 more | 2021-02-23 |