Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198936 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2021-12-14 |
| 11198937 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2021-12-14 |
| 11014853 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | Jennifer Y. Sun | 2021-05-25 |
| 11008653 | Multi-layer coating with diffusion barrier layer and erosion resistant layer | Xiaowei Wu, Jennifer Y. Sun | 2021-05-18 |