Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more | 2021-09-28 |
| 10975469 | Plasma resistant coating of porous body by atomic layer deposition | Vahid Firouzdor, Rajinder Dhindsa, Daniel Sang Byun, Dana Marie Lovell | 2021-04-13 |
| 10899892 | Copolymerized high temperature bonding component | Jennifer Y. Sun | 2021-01-26 |