Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094589 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ho-yung David Hwang | 2021-08-17 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2021-02-23 |