Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204200 | Adaptive baking method | Tzung-Chen Wu, Wen-Zhan Zhou, Heng-Jen Lee | 2021-12-21 |
| 11164938 | DRAM capacitor module | Uday Mitra, Regina Freed, Sanjay Natarajan, Lequn Liu | 2021-11-02 |
| 11139205 | Self-aligned subtractive interconnect patterning | Lei Zhong | 2021-10-05 |
| 11094589 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ying Zhang | 2021-08-17 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2021-02-02 |