Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164938 | DRAM capacitor module | Regina Freed, Ho-yung David Hwang, Sanjay Natarajan, Lequn Liu | 2021-11-02 |
| 11062942 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Regina Freed, Mehul Naik | 2021-07-13 |
| 11037825 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Swaminathan Srinivasan, Regina Freed | 2021-06-15 |
| 10892183 | Methods for removing metal oxides | Amrita B. Mullick, Regina Freed | 2021-01-12 |
| 10892187 | Method for creating a fully self-aligned via | Regina Freed, Sanjay Natarajan | 2021-01-12 |