Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133152 | Methods and apparatus for performing profile metrology on semiconductor structures | Regina Freed, Russell Chin Yee Teo | 2021-09-28 |
| 11037825 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, He Ren, Swaminathan Srinivasan, Regina Freed, Uday Mitra | 2021-06-15 |