Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164938 | DRAM capacitor module | Uday Mitra, Ho-yung David Hwang, Sanjay Natarajan, Lequn Liu | 2021-11-02 |
| 11133152 | Methods and apparatus for performing profile metrology on semiconductor structures | Russell Chin Yee Teo, Madhur Sachan | 2021-09-28 |
| 11062942 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Mehul Naik, Uday Mitra | 2021-07-13 |
| 11037825 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Swaminathan Srinivasan, Uday Mitra | 2021-06-15 |
| 10892183 | Methods for removing metal oxides | Amrita B. Mullick, Uday Mitra | 2021-01-12 |
| 10892187 | Method for creating a fully self-aligned via | Uday Mitra, Sanjay Natarajan | 2021-01-12 |