Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037825 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Regina Freed, Uday Mitra | 2021-06-15 |
| 10950450 | Silicide films through selective deposition | Abhijit Basu Mallick, Nicolas L. Breil | 2021-03-16 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more | 2021-02-02 |