Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049699 | Gas box for CVD chamber | Tejas Ulavi, Amit Kumar BANSAL, Nitin Pathak | 2021-06-29 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more | 2021-02-02 |