Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11107704 | Gas input system for a substrate processing chamber | Thuy Britcher, Amit Kumar BANSAL | 2021-08-31 | $168,860,000 |
| 11049699 | Gas box for CVD chamber | Amit Kumar BANSAL, Nitin Pathak, Ajit Balakrishna | 2021-06-29 | $47,858,000 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more | 2021-02-02 | $74,085,000 |
| 10910243 | Thermal management system | Dhritiman Subha Kashyap, Sanjeev Baluja | 2021-02-02 | $74,085,000 |