Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078568 | Pumping apparatus and method for substrate processing chambers | David Blahnik, Amit Kumar BANSAL, Tuan Nguyen | 2021-08-03 |
| 11047043 | Chamber liner for high temperature processing | Sanjeev Baluja, Ren-Guan Duan | 2021-06-29 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10907252 | Horizontal heat choke faceplate design | Yuxing Zhang, Daniel HWUNG, Ashutosh Agarwal, Kaushik Alayavalli | 2021-02-02 |
| 10889894 | Faceplate with embedded heater | Daniel HWUNG, Yuxing Zhang, Kaushik Alayavalli, Amit Kumar BANSAL | 2021-01-12 |