Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | Paul B. Reuter, Luke Bonecutter, Douglas B. Baumgarten | 2021-11-09 |
| 11094504 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more | 2021-08-17 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | Kalyanjit Ghosh, Amit Kumar BANSAL, Tuan Nguyen | 2021-08-03 |