Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | Paul B. Reuter, Luke Bonecutter, Douglas B. Baumgarten | 2021-11-09 | $68,627,000 |
| 11094504 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more | 2021-08-17 | $63,158,000 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | Kalyanjit Ghosh, Amit Kumar BANSAL, Tuan Nguyen | 2021-08-03 | $89,613,000 |