Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk | 2021-11-30 |
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Paul B. Reuter, Luke Bonecutter | 2021-11-09 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Dean C. Hruzek, Paul B. Reuter, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti +1 more | 2021-07-13 |