Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024521 | Heat treatment method for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2021-06-01 |
| 11024524 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2021-06-01 |
| 11004693 | Light-irradiation heat treatment method and heat treatment apparatus | — | 2021-05-11 |
| 10978319 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Shinichi Kato, Hideaki Tanimura | 2021-04-13 |
| 10950472 | Light-irradiation thermal treatment apparatus | Takahiro Yamada, Makoto Abe, Jun Watanabe, Shinji Miyawaki | 2021-03-16 |