Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081409 | Heat treatment apparatus of light irradiation type and heat treatment method | Takashi Ito, Nobuhiko Nishide | 2021-08-03 |
| 11024521 | Heat treatment method for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2021-06-01 |
| 11024524 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2021-06-01 |
| 10930521 | Light irradiation type heat treatment method | Masashi Furukawa | 2021-02-23 |