Dual temperature heater

Assignee

• Applied Materials

Inventors

• Dale R. Du Bois (38 patents)
• Juan Carlos Rocha-Alvarez (153 patents)
• Sanjeev Baluja (104 patents)
• Ganesh Balasubramanian (114 patents)
• Lipyeow Yap (4 patents)
• Jianhua Zhou (110 patents)
• Thomas Nowak (56 patents)

View full patent text on Google Patents →