| 11139150 |
Nozzle for multi-zone gas injection assembly |
Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating |
2021-10-05 |
| 11139142 |
High-resolution three-dimensional profiling of features in advanced semiconductor devices in a non-destructive manner using electron beam scanning electron microscopy |
Ofer Yuli |
2021-10-05 |
| 11119051 |
Particle detection for substrate processing |
Todd Egan, Mehdi Vaez-Iravani, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more |
2021-09-14 |
| 10955832 |
Adaptive chamber matching in advanced semiconductor process control |
— |
2021-03-23 |
| 10943763 |
Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam |
Ofer Yuli |
2021-03-09 |
| 10930531 |
Adaptive control of wafer-to-wafer variability in device performance in advanced semiconductor processes |
Lior ENGEL, Dermot Cantwell |
2021-02-23 |
| 10929586 |
Predictive spatial digital design of experiment for advanced semiconductor process optimization and control |
Dermot Cantwell, Waheb Bishara |
2021-02-23 |
| 10923371 |
Metrology system for substrate deformation measurement |
Mehdi Vaez-Iravani, Todd Egan, Kyle Tantiwong |
2021-02-16 |
