Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating | 2021-10-05 |
| 11139142 | High-resolution three-dimensional profiling of features in advanced semiconductor devices in a non-destructive manner using electron beam scanning electron microscopy | Ofer Yuli | 2021-10-05 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10955832 | Adaptive chamber matching in advanced semiconductor process control | — | 2021-03-23 |
| 10943763 | Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam | Ofer Yuli | 2021-03-09 |
| 10930531 | Adaptive control of wafer-to-wafer variability in device performance in advanced semiconductor processes | Lior ENGEL, Dermot Cantwell | 2021-02-23 |
| 10929586 | Predictive spatial digital design of experiment for advanced semiconductor process optimization and control | Dermot Cantwell, Waheb Bishara | 2021-02-23 |
| 10923371 | Metrology system for substrate deformation measurement | Mehdi Vaez-Iravani, Todd Egan, Kyle Tantiwong | 2021-02-16 |