Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189451 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff +3 more | 2021-11-30 |
| 11139142 | High-resolution three-dimensional profiling of features in advanced semiconductor devices in a non-destructive manner using electron beam scanning electron microscopy | Samer Banna | 2021-10-05 |
| 10943763 | Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam | Samer Banna | 2021-03-09 |
| 10886092 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff +3 more | 2021-01-05 |