Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204312 | In-situ full wafer metrology system | Ami Sade, Shay Assaf, Jacob Newman | 2021-12-21 |
| 11187654 | Imaging reflectometer | Guoheng Zhao, Mehdi Vaez-Iravani | 2021-11-30 |
| 11119051 | Particle detection for substrate processing | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10935492 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2021-03-02 |
| 10923371 | Metrology system for substrate deformation measurement | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong | 2021-02-16 |
| 10886155 | Optical stack deposition and on-board metrology | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Daniel Lee Diehl, Yong Cao +5 more | 2021-01-05 |