Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Abraham Ravid +1 more | 2021-09-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Abraham Ravid +1 more | 2021-09-14 |