Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204330 | Systems and methods for inspection of a specimen | Eliezer Rosengaus | 2021-12-21 |
| 11187654 | Imaging reflectometer | Guoheng Zhao, Todd Egan | 2021-11-30 |
| 11156566 | High sensitivity image-based reflectometry | Guoheng Zhao | 2021-10-26 |
| 11150078 | High sensitivity image-based reflectometry | Guoheng Zhao | 2021-10-19 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10923371 | Metrology system for substrate deformation measurement | Todd Egan, Samer Banna, Kyle Tantiwong | 2021-02-16 |