Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204312 | In-situ full wafer metrology system | Todd Egan, Shay Assaf, Jacob Newman | 2021-12-21 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |