Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11196360 | System and method for electrostatically chucking a substrate to a carrier | Kim Vellore, Steven Trey Tindel | 2021-12-07 |
| 11195756 | Proximity contact cover ring for plasma dicing | James M. Holden, Ajay Kumar, Aparna Iyer, Alan Ouye | 2021-12-07 |
| 11189516 | Method for mask and substrate alignment | Greg Freeman, Patricia A. Schulze, Ozkan Celik | 2021-11-30 |
| 11183411 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Kim Vellore, Steven Trey Tindel | 2021-11-23 |
| 11158540 | Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process | Wenguang Li, James S. Papanu, Wei-Sheng Lei, Prabhat Kumar, Brad Eaton +1 more | 2021-10-26 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Daniel Lee Diehl, Roey Shaviv | 2021-07-06 |
| 11047039 | Substrate carrier having hard mask | Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |
| 10932323 | Reflector and susceptor assembly for chemical vapor deposition reactor | Brian H. Burrows, Abril Cabreros, David Masayuki Ishikawa, Brian J. Brown | 2021-02-23 |
| 10916464 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Kim Vellore, Steven Trey Tindel | 2021-02-09 |